Field Service Engineer DMV Region

Oxford Instruments is hiring a Field Service Engineer to provide technical support, installation, and maintenance for plasma etch and deposition systems. The role includes troubleshooting, customer training, system calibration and upgrades, and frequent travel to customer sites.

Responsibilities:

• System Installation & Commissioning Lead the installation and commissioning of advanced plasma etch and deposition systems (RIE, CVD, ICP, ICPCVD, ALE, ALD), ensuring full compliance with customer specifications, cleanroom standards, and process readiness
• Preventive & Corrective Maintenance Execute scheduled and emergency maintenance with precision. Diagnose root causes beyond surface-level symptoms and validate repairs against stringent vacuum tolerances, leak-up rates, and process benchmarks
• Customer Engagement & Technical Training Build trust and long-term relationships through responsive communication and hands-on training. Empower customers to operate and maintain systems confidently across key processes
• Advanced Troubleshooting Resolve complex hardware, and software issues using specialized tools (vacuum leak detectors, RF power meters, DVMs, LCR meters, multimeters). Provide remote support when needed to minimize downtime and maximize uptime
• Calibration & System Upgrades Calibrate critical components (AMUs, RF Generators, APCs, MFCs) and implement performance-enhancing upgrades (turbo pumps, PLCs, breakers) to ensure optimal system reliability and throughput

Requirements:

• Bachelor's degree in Electrical Engineering, Mechanical Engineering, Physics, or a related technical field
• Equivalent hands-on experience in semiconductor equipment service may substitute
• 5–7 years of field service experience in the semiconductor industry, with a focus on plasma etch and deposition systems
• Familiarity with cleanroom operations and safety protocols
• Hands-on experience with vacuum technologies: turbo pumps, cryo pumps, roughing pumps
• Skilled in troubleshooting 208V electrical systems and 24V control subsystems
• Proficient with diagnostic instruments:
• Vacuum leak detectors
• RF power meters
• DVMs, LCR meters, multimeters, megohm meters
• Ability to read and interpret mechanical, pneumatic, and electrical schematics and plumbing diagrams
• Strong understanding of RF theory and inductively coupled plasma (ICP) systems
• Familiarity with semiconductor processes: RIE, PECVD, ICP, ALD
• Hold a valid driver's license and safe driving record, passport, and ability to travel independently
• Experience with Brooks platforms, Pfeiffer/Edwards pumping systems, and MKS components
• Knowledge of calibration and optimization of APCs and MFCs
• Proactive problem-solving and openness to continuous learning
• Effective communicator with strong listening skills
• Adaptable to evolving technologies and customer needs
• Comfortable working independently or as part of a team
• Passion for solving complex technical challenges with precision and care
• Proactive in anticipating customer needs and delivering timely, high-quality solutions
• Builds trust through clear communication and confident issue resolution
• Eager to learn, grow, and collaborate to uphold the highest standards of service