Procedure Validation & Improvement: Review and validate technical procedures (e.g., eSL10, eDRX1) on in-house tools prior to production deployment
Ensure clarity, accuracy, and safety prioritization in Issue Correction Requests (ICRs)
ICR Lifecycle Ownership: Manage the end-to-end lifecycle of ICRs, from submission through resolution
Coordinate tool validation, stakeholder communication, and post-release reviews
Escalation Handling & POA Execution: Lead technical escalations by identifying root causes and executing structured Plans of Action (POAs)
Collaborate with engineering and service teams to ensure timely resolution
Cross-Regional Support & Shift Coverage: Participate in Follow-the-Sun (FTS) support programs, including 5x24 or 7x24 coverage models
Ensure seamless handoffs and consistent customer experience across global hubs
Technical Documentation & Knowledge Transfer: Maintain organized documentation of tool issues, fixes, and best practices
Contribute to internal knowledge bases and training materials
Customer Engagement & Case Intake: Interface with field teams and customers to intake support cases using structured engagement forms
Gather detailed logs, problem statements, and target metrics for efficient troubleshooting
Tool & Subsystem Expertise: Develop deep technical knowledge of E-Beam subsystems (e.g., TMAC, ASC, CSSI, RAID)
Support diagnostics and contribute to subsystem-level issue resolution.

At least 5 years of semiconductor metrology tool maintenance experience
Must be able to travel domestic and international of at least 30%
Hands-on experience in hardware and software integration, testing and troubleshooting in semiconductor wafer inspection systems is an advantage
Excellent data analytical and diagnostic skills
Good presentation and communication skills
Proficient with all Windows office suite applications such as Excel, PowerPoint, Power BI
Hands-on experience with E-Beam products is highly preferred
High Vacuum experience preferred
Basic knowledge of Electron beam microscopy
Strong project management skills are a plus.

KLA’s total rewards package may also include participation in performance incentive programs
Eligibility for additional benefits including but not limited to: medical, dental, vision, life, and other voluntary benefits
401(K) including company matching
Employee stock purchase program (ESPP)
Student debt assistance
Tuition reimbursement program
Development and career growth opportunities and programs
Financial planning benefits
Wellness benefits including an employee assistance program (EAP)
Paid time off and paid company holidays
Family care and bonding leave
Interns are eligible for some of the benefits listed.

Technical Support Engineer, Ebeam – High Vacuum

Key skills